JPH02146837U - - Google Patents
Info
- Publication number
- JPH02146837U JPH02146837U JP5433889U JP5433889U JPH02146837U JP H02146837 U JPH02146837 U JP H02146837U JP 5433889 U JP5433889 U JP 5433889U JP 5433889 U JP5433889 U JP 5433889U JP H02146837 U JPH02146837 U JP H02146837U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- repositioning
- rail
- wafers
- reversing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433889U JPH02146837U (en]) | 1989-05-10 | 1989-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433889U JPH02146837U (en]) | 1989-05-10 | 1989-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146837U true JPH02146837U (en]) | 1990-12-13 |
Family
ID=31576314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5433889U Pending JPH02146837U (en]) | 1989-05-10 | 1989-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146837U (en]) |
-
1989
- 1989-05-10 JP JP5433889U patent/JPH02146837U/ja active Pending
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